| 類型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar |
| 精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
| 溫度效應(yīng) | | | |
| 零點 | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
| 滿量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
| 壓力，大 | kPa (absolute) | 400 | 260 | 130 |
| 分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
| 低讀數(shù) | percent FS | 0.01 | 0.01 | 0.01 |
| 建議的低讀數(shù) | percent FS | 0.05 | 0.05 | 0.05 |
| 建議的低控制壓力 | percent FS | 0.5 | 0.5 | 0.5 |
| 溫度 | | | |
| 運行（環(huán)境） | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| 在法蘭處烘烤 | °C | ≤110 | ≤110 | ≤110 |
| 貯存 | °C | –20 … +85 | –20 … +85 | –20 … +85 |
| 電源電壓 | | +14 … +30 VDC or±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) |
| 功耗 | | | |
| 加熱時 | W | ≤16 | ≤16 | ≤16 |
| 運行溫度 | W | ≤11 | ≤11 | ≤11 |
| 輸出信號（模擬） | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| Measurement rate | kHz | 1 | 1 | 1 |
| 反應(yīng)時間 (2) | ms | 2 ... 20 | 2 ... 20 | 2 ... 20 |
| Signal processing time | ms | 2 | 2 | 2 |
| 保護等級 | | IP 30 | IP 30 | IP 30 |
| 標(biāo)準(zhǔn) | | | |
| CE 合規(guī) | | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS |
| ETL 認證 | | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 |
| SEMI 合規(guī) | | SEMI S2 | SEMI S2 | SEMI S2 |
| 電氣連接 | | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male |
| 設(shè)定點 | | | |
| 設(shè)定點數(shù)量 | | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) |
| 繼電器觸點 | | ≤30 | ≤30 | ≤30 |
| 滯后 | percent FS | 1 | 1 | 1 |
| 診斷端口 | | | |
| 協(xié)議 | | USB | USB | USB |
| 讀數(shù) | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
| 設(shè)置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
| 暴露于真空的材料 | | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) |
| 內(nèi)部容積 | | | |
| 內(nèi)部容積 1/2'' 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 重量 | | | |
| 重量 1/2'' 管 | g | 837 | 837 | 837 |
| 重量 DN 16 ISO KF | g | 852 | 852 | 852 |
| 重量 DN 16 CF-R | g | 875 | 875 | 875 |
| 重量 8 VCR® | g | 897 | 897 | 897 |
| EtherCAT | | | |
| 協(xié)議 EtherCAT | | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT |
| 通訊標(biāo)準(zhǔn) | | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
| 節(jié)點地址 | | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification |
| 物理層 | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
| 數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
| 數(shù)字功能設(shè)置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset |
| (CoE) | | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information |
| 過程數(shù)據(jù) | | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping |
| EtherCAT 連接器 | | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT |
| 電纜 | | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher |
| 電纜長度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| Signal processing time | ms | 2 | 2 | 2 |
